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Deep air purification in «clean rooms»

«Clean areas» or «clean rooms» are used in many branches of industry, especially in microelectronics as well as in pharmaceutical industry, pharmacology, medicine etc.

Microelectronic industry specifies special requirements to air purity in production facilities.

Until quite recently the air of «clean rooms» was purified only of dust microparticulates and there was no need to remove from it some chemical components. But technological development and size reduction of microcircuits elements necessitate to purify air of such not big amounts of ammonia (NH3), sulfur dioxide (SO2), hydrogen sulfide (H2S), nitrogen dioxide (NO2) and other aggressive impurities caused corrosion of microcircuits during their manufacturing. The question of air purification of trace impurities become more and more essential and now it emerges as required procedure.

Modern enterprises of microelectronic industry use «clean rooms» equipped with chemical filters.

Differential characteristics of air purification in «clean rooms» are low concentrations and often low air humidity.

Using strong-acid and strong-basic fibrous materials PANION® ensures air purification of impurities of ammonia (NH3), hydrogen sulfide (H2S), sulfur dioxide (SO2), nitrogen dioxide (NO2) and other acid or basic pollutants until degree of microgram per cubic meter by any feasible humidity levels of cleaning air.

Selection of filtering materials

The most effective materials for air purification in «clean rooms» are:

Panion 310 — Substances of acid nature SO2, SO3, HCl, NxOy, etc.

Fibrous ion exchanger PANION 310

PANION 310 – fibrous anion exchanger

Applications

  • Air purification from volatile substances of acid nature (SO2, SO3, HF, HCl, HCOOH, CrO3 и etc) in industrial and domestic air cleaning systems;
  • Human protective means (respirators, gas-masks, protective costumes etc): removal of gases and vapors of acid nature (SO2, SO3, HF, HCl, HCOOH, CrO3);

Technical specification*

Functional groups -N(CH3)2, =NH
The base polymer polyacrylonitrile (PAN) fiber
Ion exchange capacity, meq/g 4 - 5
Temperature working range 0 – 50°C
pH working range 1 – 12
Textile forms
  • Staple fiber: cut length 30-70 mm.
  • Non-woven needle-punched fabric: surface density from 200 to 1000 g/m2; width of the fabric up to 1600 mm, thickness from 2 to 10 mm.
  • On special request the others textile forms can be produced: threads, cloths, bands, short staple fiber etc...
Stability against aggressive media Stable against diluted solutions of acids and alkalis
Regeneration With a weak solution of soda Na2CO3
Stable in multiple cycles of «sorption-regeneration», «wetting-drying»

* - on a customer request fibrous ion exchange material with other physical and chemical properties can be produced.

Panion 320

Fibrous ion exchanger PANION 320

PANION 320 – strong acid fibrous anion exchanger

Applications

  • Air purification from volatile substances of acid nature (SO2, SO3, HF, HCl, H2SO4, NxOy, CrO3 etc) in industrial and domestic air cleaning systems. PANION 320 is effective in wide range of air humidity (30-100%);
  • Water purification from the nitrates, anions of metals (chrome, molybdenum, wolfram, vanadium);
  • Human protective means (respirators, gas-masks, protective costumes etc): removal of gases and vapors of acid nature SO2, SO3, HF, HCl, HCOOH, CrO3.

Technical specification*

Functional groups
The base polymer polyacrylonitrile (PAN) fiber
Ion exchange capacity, meq/g 1,5 – 2,5 (on strong base groups)
0,8 – 1,5 (on weak base groups)
Temperature working range 0 – 50°C
pH working range 1 – 12
Textile forms
  • Staple fiber: cut length 30-70 mm.
  • Non-woven needle-punched fabric: surface density from 200 to 1000 g/m2; width of the fabric up to 1600 mm, thickness from 2 to 10 mm.
  • On special request the others textile forms can be produced: threads, cloths, bands, short staple fiber etc.
Stability against aggressive media Stable against diluted solutions of acids and alkalis
Regeneration With a weak solution of soda Na2CO3
Stable in multiple cycles of «sorption-regeneration», «wetting-drying»

* - on a customer request fibrous ion exchange material with other physical and chemical properties can be produced.

Panion 410 — Substances of basic nature: ammonia, amines, hydrazine etc.

Fibrous ion exchanger PANION 410

PANION 410 – fibrous chemically active filtering material for air purification from toxic substances of base nature

Applications

Air purification from volatile substances of base nature: ammonia, amines, aerosols of alkalis at low concentrations (10-500 microgram/m3), and in wide range of air humidity (30-100%);

Panion 410 is intent for application in filtering elements in forced and recycling air cleaning systems.

Panion 410 is especially effective for air purification in “clean room” of microelectronic, pharmaceutical industry, medicine etc.

Panion 410 has antimicrobial and antibacterial effect.

Technical specification*

The base polymer Anion exchanger with tertiary amino groups on base of polyacrylonitrile (PAN) fiber
Ion exchange capacity on NH3, meq/g 2,5 – 4
Air humidity working range, % 15 – 100
Temperature working range 0 – 60°C
Textile forms
  • Non-woven needle-punched fabric: surface density from 250 до 500 g/m2; width of the fabric up to 1600 mm, thickness from 1,5 до 4 mm.
Regeneration With a solution of mineral acid

* - on a customer request fibrous ion exchange material with other physical and chemical properties can be produced.

Panion 440 — Carbon monoxide CO

Fibrous ion exchanger PANION 440

PANION 440 — fibrous ion exchanger intended for low-temperature air purification from carbon monoxide.

PANION 440 is metal-containing carbon-fibrous catalyst.

Applications

  • Air purification from impurities of CO in filtering units while the content of CO is until 0,03 vol.% (20 MAC) and humidity of the cleaning air from 20 to 95%;
  • Human protective means (respirators, gas-masks for removal of CO while its content in air is until 20 MAC (maximum allowable concentration) and humidity 20-85%; Self-rescuers for removal of high concentrations of CO (0,25-0,5 vol. %) in the cleaning air and humidity 30-95%.

Technical specification*

The base polymer carbon fibrous catalytically-activated fiber
Catalytic activity: residual concentration of CO in the cleaning air
  • by content of CO 0,03 vol.%, linear rate 2,1 cm/sec. and humidity 20-70% - max. 5 mg/m3;
  • by content of CO 0,5 vol.%, volume rate 13 000 h-1 and humidity 70-85% - max. 20 mg/m3
Temperature working range 0 – 500°C
Textile forms
  • Staple fiber cut length 40-70 mm.
  • Short-cut fiber: : cut length 1-10 mm.
  • Textile woven fabric: surface density 520-620 g/m2, max. width – 400 mm, thickness – 2-5 mm.

* - on a customer request fibrous ion exchange material with other physical and chemical properties can be produced.

Panion 450 — Nitrogen dioxide NO2

Panion 510 — Combined removal of substances of acid, basic and organic nature

Fibrous ion exchanger PANION 510

PANION 510 — filtering material for air and water purification from composition of toxic substances of acid, base and organic nature.

PANION 510 – is combination of several layers of fibrous ion exchange and fibrous activated carbon textile materials. Any combination of ion exchange and active carbon materials can be produced in dependence on composition of contaminants on the customer request.

Applications

  • Air purification from mixture of toxic contaminants of acid, base and organic nature: SO2, SO3, HF, HCl, HCOOH, CrO3, organic acids, NH3, amines, benzene, acetone, formaldehyde, bad-smelling substances, poisonous substances, warfare agents etc. PANION 510 is effective in wide range of air humidity (30-100%) in industrial and domestic air cleaning systems;
  • Water purification from toxic organic contaminants, ions of heavy metals, nitrates, anions of metals (chrome, molybdenum, tungsten, vanadium), water softening;
  • Human protective means (respirators, gas-masks, protective costumes etc etc): removal toxic substances of acid (SO2, SO3, HF, HCl etc.), base (NH3, amines), and organic (benzene, acetone, toluene, warfare agents, poisonous substances) nature.

Technical specification*

Functional groups Amino- and carboxylic groups
Adsorption activity on methylene blue, mg/g min 26
Ion exchange capacity, meq/g min 0,6 (on amino groups)
min 0,8 (on carboxylic groups)
Textile forms Non-woven needle-punched fabric
Surface density 400 – 1000 g/m2
Width max 1600 mm
Thickness 3 – 10 mm
Textile form ion exchange layers Non-woven needle-punched fabric
Textile form of fibrous active carbon material Non-woven material, activated carbon gauze fabric, fabric
Temperature working range 0 – 50°С
pH working range 1 – 12
Regeneration Type 1, 2 – are not regenerating
type 3 – with water vapor

* - on a customer request fibrous ion exchange material with other physical and chemical properties can be produced.